AMAT 0010-23715 high-temperature probe application material semiconductor

AMAT 0010-23715 is a high-temperature probe module specially designed by Applied Materials Corporation (AMAT) for its PMAX series of heat treatment equipment, used for real-time monitoring and control of temperature distribution and thermal radiation in high-temperature processes. The following is the detailed analysis:

I. Product Overview
Model: 0010-23715
Manufacturer: Applied Materials Corporation (AMAT)
Type: Transmitter probe assembly
Application: Real-time monitoring and control of temperature distribution and thermal radiation in high-temperature processes
Ii. Technical Parameters
Temperature range: Covering the high-temperature processes supported by PMAX equipment (such as 500°C – 1200°C, specific details should refer to the equipment specifications)
Accuracy: ±1% (typical value, dependent on calibration)
Material: High-temperature resistant ceramic or metal alloy, suitable for harsh processing environments
Interface: Supports high-speed data transmission and control signal interaction with the PMAX system
Size: Modular design, suitable for the space limitations of wafer processing chambers

Iii. Functional Features
Non-contact temperature measurement
Based on infrared radiation or spectral analysis, physical damage to the wafer is avoided.
Multi-region temperature distribution monitoring
Support real-time feedback of process parameters to ensure temperature uniformity.
High-precision sensing
Advanced infrared or spectral technology is adopted to capture minute temperature changes.
Environmental resistance
Adapt to high-temperature, vacuum or corrosive gas environments to ensure long-term reliability.
Modular design
It is convenient for quick replacement and maintenance, reducing downtime.
Real-time data feedback
Support closed-loop control and optimize process parameters.

Application field
Heat treatment of semiconductor wafers
Monitor the temperature distribution of high-temperature processes such as annealing, oxidation and diffusion.
Cooperate with the PMAX transmitter
Achieve high-precision thermal radiation management to enhance process stability and product yield.