AMAT 0090-03581 is a high-temperature probe module specially designed by Applied Materials Corporation (AMAT) for its PMAX series of heat treatment equipment, used for real-time monitoring and control of temperature distribution and thermal radiation in high-temperature processes. The following is the detailed analysis:
I. Product Overview
Model: 0090-03581
Manufacturer: Applied Materials Corporation (AMAT)
Type: Transmitter probe assembly
Application: Real-time monitoring and control of temperature distribution and thermal radiation in high-temperature processes
Ii. Technical Parameters
Temperature range: Covering the high-temperature processes supported by PMAX equipment (such as 500°C – 1200°C, specific details should refer to the equipment specifications)
Accuracy: ±1% (typical value, dependent on calibration)
Material: High-temperature resistant ceramic or metal alloy, suitable for harsh processing environments
Interface: Supports high-speed data transmission and control signal interaction with the PMAX system
Size: Modular design, suitable for the space limitations of wafer processing chambers
Iii. Functional Features
Non-contact temperature measurement
Based on infrared radiation or spectral analysis, physical damage to the wafer is avoided.
Multi-region temperature distribution monitoring
Support real-time feedback of process parameters to ensure temperature uniformity.
High-precision sensing
Advanced infrared or spectral technology is adopted to capture minute temperature changes.
Environmental resistance
Adapt to high-temperature, vacuum or corrosive gas environments to ensure long-term reliability.
Modular design
It is convenient for quick replacement and maintenance, reducing downtime.
Real-time data feedback
Support closed-loop control and optimize process parameters.
Application field
Heat treatment of semiconductor wafers
Monitor the temperature distribution of high-temperature processes such as annealing, oxidation and diffusion.
Cooperate with the PMAX transmitter
Achieve high-precision thermal radiation management to enhance process stability and product yield.
Our mission:
We are proud of having the best prices. If you find a fixed-price item on the Internet that is the same as one in our store but at a lower price, please let us know and give us a chance to make our price reach or exceed that of our competitors.
Feedback:
We hope that customers are completely satisfied with the purchase. If you are not satisfied with any aspect of your transaction, please contact us before leaving feedback and inform us of the problem. We will do our best to solve the issue that satisfies you so as to receive positive feedback. We believe that good communication ensures the success of transactions and effective problem-solving, and provides both parties with the best opportunity to have a positive trading experience on the website.
There are no reviews yet.