ZYGO SKU: 8020-0237-05 | ZMI 501A | Measurement Electronics.The ZYGO ZMI 501A Measurement Electronics Module, identified by the SKU 8020-0237-05, is a high-precision, multi-channel displacement measuring interferometer system designed for applications requiring extreme accuracy in positioning and displacement measurements. This module is part of Zygo Corporation’s ZMI series, which specializes in nano-position sensors and displacement measuring interferometers.（You may also need:ZYGO 7702 Laser Head）
Key specifications of the ZMI 501A include:
- Physical Characteristics: It has a weight of 2 lb (1 Kg) and a cable clearance of 5 inches (127 mm) at both ends.
- Electrical Requirements: The nominal power requirements are +5.2 VDC with a current of 3.3 A.
- Environmental Conditions: It is designed to operate within an environmental range of 0 to 40°C in non-condensing conditions.
- Measurement Board: Each board can handle 2 axes, with a minimum optical input power of 8 µW and a linearity accuracy of 1.3 LSB at 3V.
- Serial (Quadrature) Data Specifications: The position resolution can reach a maximum of 1/512 (1.24 nm), with a position range of ± 10.6 m and a maximum target mirror velocity of 475 mm/sec. The data rate is selectable from 3 to 24 MHz.
- Parallel Data Specifications: The position resolution is constant at 1/512 (1.24 nm), with a position range of ± 10.6 m and a maximum target mirror velocity of 475 mm/sec.
The ZMI 501A is particularly suited for applications requiring high precision and stability, such as wafer stages, stacked stage systems, reticle stages, gantry systems, and steering mirrors. It is designed to be integrated with ZMI lasers, such as the ZMI 7705, for enhanced performance in precision metrology applications.
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