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ZYGO ZMI-4004 | 8020-0500-01 | PCB Card

Product features High-precision measurement: By using laser interferometry technology, displacement measurements at the nanometer level or even higher resolution can be achieved. It is suitable for high-precision positioning and motion control applications, such as semiconductor manufacturing, optical processing, metrology, and high-precision motion control fields. Multi-channel support: The ZMI-4004 may support multiple interferometric measurement channels, suitable for complex multi-axis measurement systems. High-performance signal processing: It has high-performance signal processing capabilities, providing fast and accurate measurement feedback. Strong compatibility: Compatible with ZYGO's laser interferometer systems, such as the ZMI series interferometers and optical measurement systems.
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ZYGO ZMI-4004 | 8020-0500-01 | PCB Card.

The ZYGO ZMI-4004, identified by the part number 8020-0500-01, is a 4-axis, VME64x measurement board designed for high-precision displacement and distance measurements. This board is part of Zygo Corporation’s ZMI series, which specializes in nano-position sensors and displacement measuring interferometers. The ZMI-4004 is specifically designed for applications requiring high accuracy and stability in positioning and displacement measurements across four axes.

Key features of the ZYGO ZMI-4004 include:

  • 4-Axis Measurement: It provides high-precision displacement and distance measurements across four axes, making it suitable for applications where precise positioning and alignment are critical.
  • VME64x Form Factor: The board is designed to fit into a VME64x slot, allowing for easy integration into existing VME-based systems. This form factor is particularly useful in applications where space is limited, and the board needs to be compact and easily integrated into existing systems.
  • High Precision and Stability: The ZMI-4004 is designed for applications requiring extreme accuracy in positioning and displacement measurements. It is suitable for a wide range of precision metrology applications, including wafer stages, stacked stage systems, reticle stages, gantry systems, and steering mirrors.
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