Advanced Energy 3153109-002 Electrostatic Chuck High Voltage Direct Current Power Supply

I. Basic Model Information
Manufacturer: Advanced Energy (AE, United States)
Part Number: 3153109-002
Equipment Type: Dedicated High-Voltage Direct Current Power Supply for Semiconductor Wafer Electrostatic Holders (ESC)
Original Equipment Manufacturer (OEM) Compatibility: Standard for Applied Materials semiconductor etching / film deposition equipment
Alternative Name: RE CHUCK Power Supply, High-Voltage Holder Drive Power Supply

Electrical Specifications and Parameters
1. Input
General wide-range AC input: 85~264 VAC, single-phase industrial mains power
2. Output (Core High Voltage)
Output power: 600W
Output voltage adjustable range: 18VDC ~ 500VDC
Maximum output current: 120A
Output characteristics: Low ripple high-frequency switching regulator, supports voltage/current dual-loop adjustable
Isolated high-voltage output, suitable for bipolar electrostatic holders to adsorb silicon wafers
3. Mechanical and Heat Dissipation
Rack-mounted drawer modular structure, equipped with a cooling fan
Industrial-strength PCB, vacuum semiconductor equipment with vacuum resistance and low gas emission components
Operating temperature: 0℃ ~ +55℃, cabinet sealed cooling design

Interface Definitions of the Body
High-voltage aviation connector (multi-core circular): Outputs high voltage to the wafer electrostatic holder ESC
DB9 serial port: Equipment communication, upper computer parameter configuration, fault reading
Terminal block: External analog quantity control (0-10V/4-20mA setpoint), interlock, enable signal
Internal backplane bus: Interacts with the main controller of the semiconductor equipment

Built-in Complete Protection Functions
OVP Overvoltage Protection, OCP Overcurrent Limiting, OTP Overtemperature Protection
High-voltage short circuit / load grounding protection, interlock safety circuit
Fan failure detection, internal power supply undervoltage alarm
Fault retention, serial port can export historical fault codes

 Core Application Scenarios
Used exclusively for semiconductor wafer manufacturing equipment:
Applied Materials AMAT PVD/CVD etching machines, deposition machines
High-voltage electrostatic holder (ESC) power supply in vacuum chambers, providing high-voltage electrostatic adsorption for silicon wafers
Panel display, photovoltaic coating vacuum equipment high-voltage holder drive