Agilent 5517DL/039/300 Laser Head

Product Description

Agilent 5517DL/039/300 is a Zeeman-split dual-frequency heterodyne He-Ne laser head of Agilent (now Keysight) 5517 series. Suffix L means low heat version. Option 039: 9 mm large beam diameter; Option 300: 5 MHz reference beat frequency low-power version. Class II laser with stable vacuum wavelength at 633 nm. Designed for high-speed stage precision laser interferometry measurement, compatible with VME and PC-based interferometer control systems. It features superior wavelength stability, low magnetic leakage and long MTBF. Widely used for high dynamic displacement applications in semiconductor and flat-panel industries for high-precision position, velocity and length metrology.

Specifications

• Model: Agilent 5517DL/039/300
• Laser Type: He-Ne, Zeeman-split dual-frequency heterodyne laser
• Laser Safety Class: Class II
• Vacuum Wavelength: 632.99137 nm
• Reference Beat Frequency: 5 MHz (Option300)
• Max Linear Stage Velocity: 1329 mm/s
• Beam Diameter: 9 mm (Option039)
• Min Output Power: ≥80 μW; ≥50 μW after 3 years (Option300 low power spec)
• Max Output Power: 220 μW (Option300)
• Beam Height: 80.8 ±1.0 mm
• Power Supply: +15 V ±0.3 V, max 3.0 A; -15 V ±0.3 V, max 0.3 A
• Warm-up Time: 45 min (with cooling fan & vented cover)
• Wavelength Stability: 2 ppb (1 hour); 20 ppb (lifetime)
• Wavelength Accuracy: Standard ±0.1 ppm, optional calibration to ±0.02 ppm
• Typical MTBF: > 50,000 hours
• Operating Power Dissipation: 23W; Warm-up Power: 35W
• Magnetic Field Emission: ≤5.25 milliGauss at 4.6 m distance from housing
• Weight: 3.4 kg

Applications

1. Semiconductor Lithography: Interferometric displacement, positioning and trajectory measurement for high-speed wafer stages
2. Flat Panel Production Line: Position calibration and length metrology for high-speed stages of LCD/OLED
3. High-precision Machine Tools & CMM: Calibration of straightness, positioning accuracy and repeatability
4. Laser Interferometer Metrology Systems: Light source for 5501A /5527A interferometer mainframes
5. Precision Automation Equipment: Real-time dynamic displacement measurement for linear motor high-speed stages
6. Metrology Labs: Length reference standard, displacement sensor and precision geometric calibration

Series Models

5517A, 5517B, 5517C, 5517CL, 5517D, 5517DL, 5517EL, 5517FL, 5517GL