1. Product Description
Part Number: 0190‑72680 Manufacturer: Applied Materials (AMAT) Full Name: Cable Assembly, RF Generator This is a factory‑finished RF cable assembly for AMAT semiconductor process tools, complete with cable and pre‑terminated connectors at both ends. It transmits RF power between RF generator and process chamber for plasma process. It is a frequently‑consumed spare part. OEM status: New original parts are available from manufacturer. Refurbished and used units are also available from third‑party suppliers.
2. Technical Specifications
| Item | Specification |
|---|---|
| Part Type | RF coaxial cable assembly (complete assembly with connectors) |
| Function | RF power transmission between RF generator and process chamber |
| Characteristic Impedance | 50 Ω standard RF impedance |
| Cable Construction | Multi‑shielded coaxial cable for EMI suppression |
| Connectors | Factory pre‑installed custom RF coaxial connectors on both ends |
| Operating Environment | Semiconductor clean‑room, outside vacuum chamber |
| Operating Temperature | 0 ~ 55 ℃ |
| Compatible Tools | AMAT PVD / CVD process systems |
| Country of Origin | USA |
| Lifecycle | OEM new parts available; refurbished / used offered by third parties |
| Typical Third‑party Warranty | 6‑12 months |
3. Product Performance
- 50 Ω coaxial design with multi‑layer shielding, minimizes RF signal loss for efficient power delivery.
- Factory pre‑terminated connectors, plug‑and‑play installation, avoids field crimping errors.
- Excellent EMI resistance, prevents signal interference in plasma environment to secure process repeatability.
- Clean‑room compatible, withstands ambient temperature variation for 7×24 mass production.
- Flexible construction for routing between cabinet and chamber. Subject to aging: RF leakage & process drift may occur, periodic inspection & replacement required.
4. Application Fields
- Semiconductor Manufacturing: RF power connection for PVD & CVD thin‑film deposition plasma processes.
- Display Panel Manufacturing: RF wiring for AMAT coating equipment.
- R&D vacuum coating systems: RF power transmission for matching scenarios.
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