Brooks Automation 001-4130-03 Wafer Pre-align Controller

Brooks Automation 001-4130-03 Wafer Pre-align Controller
I. Basic Information
Model: 001-4130-03 (Renewed common suffix 001-4130-03R)
Series: VCE Series – High Precision Alignment Controller for Vacuum Wafers
Applicable Equipment: Brooks VTR-5, MTR-5, Magnatran7 series vacuum wafer manipulators, core control unit for semiconductor vacuum chamber wafer positioning, Brooks Automation 001-4130-03 wafer pre-alignment controller

Core Positioning Accuracy Parameters
Control Axes: X and Y linear axes + θ rotational three-axis closed-loop servo control
X/Y Positioning Accuracy: ±2μm; Repeatability Positioning Accuracy: ±0.5μm
θ Rotational Angle Accuracy: ±0.1mrad; Repeatability Accuracy: ±0.05mrad
Effective Travel: X/Y ±20mm, θ ±5°
Single Wafer Alignment Time: ≤1s
Maximum Wafer Load Capacity: 5kg
Closed-loop Encoder Resolution: Nanometer-level Closed-loop Feedback