Keysight 5517DL Laser Head

Product Description

Keysight 5517DL is a heterodyne Helium-Neon (He-Ne) laser head from the 5517 series, Class II laser product. It delivers highly stable 633 nm wavelength with Zeeman-split dual-frequency laser. The suffix L denotes low heat version. Designed for laser interferometry precision metrology of high-speed motion stages. It is commonly integrated into VME and PC-based interferometer control systems for semiconductor and flat-panel high-dynamic displacement measurement. Typical MTBF > 50,000 hours, featuring low measurement uncertainty for high-precision position, velocity and length metrology.

Specifications

• Laser Type: He-Ne, Zeeman-split dual-frequency heterodyne laser
• Laser Safety Class: Class II
• Wavelength: 633 nm
• Reference Beat Frequency: ≥4.4 MHz (Option 300: 5 MHz available)
• Max Linear Stage Velocity: 1329 mm/s
• Beam Diameter: Standard 6 mm; Option 009 for 9 mm
• Min Output Power: ≥180 μW (≥120 μW after 3 years); Option300 min 80 μW (≥50 μW after 3 years)
• Max Output Power: 1 mW; Option300 max 220 μW
• Beam Height: 80.8 ±1.0 mm
• Power Supply: +15 V ±0.3 V, max 3.0 A; -15 V ±0.3 V, max 0.3 A
• Warm-up Time: 45 min
• Wavelength Stability: 2 ppb (1 hour); 20 ppb (lifetime)
• Wavelength Accuracy: Standard ±0.1 ppm, optional calibration to ±0.02 ppm
• Typical MTBF: > 50,000 hours
• Operating Power Dissipation: 23W; Warm-up Power: 35W
• Magnetic Field Emission: ≤5.25 milliGauss at 4.6 m distance from housing
• Weight: 3.4 kg

Applications

1. Semiconductor Lithography: Interferometric position & trajectory measurement for high-speed wafer stages
2. Flat Panel Industry: Position calibration and length metrology for high-speed stages of LCD/OLED production lines
3. High-precision Machine Tools & CMM: Straightness, positioning accuracy and repeatability calibration
4. Laser Interferometer Metrology Systems: Light source for Keysight 5501A / 5527A interferometer systems
5. Precision Automation: Real-time dynamic displacement measurement for high-speed carriers and linear motor stages
6. Metrology Labs: Length reference standard, displacement sensor calibration and precision geometric measurement

Series Models

5517A, 5517B, 5517C, 5517CL, 5517D, 5517EL, 5517FL, 5517GL