MDC Vacuum KAV-150-P-10 High Vacuum Isolation Valve

Product Description

KAV-150-P-10 is a pneumatic vacuum angle valve from MDC Vacuum with KF40 flange, belonging to KAV high-vacuum isolation valve series, OEM part for AMAT semiconductor tools (AMAT PN:3870-02890). It is air-operated with spring fail-close design. Valve body is 316L stainless steel with semiconductor-grade sealing, low outgassing and excellent leak tightness. Optional position feedback is available. It serves as isolation valve for vacuum chamber switching, a critical spare part for etch and deposition vacuum loops.

Technical Parameters

• Model: KAV-150-P-10
• Brand: MDC Vacuum (USA)
• Type: Pneumatic Vacuum Angle Valve / High Vacuum Isolation Valve
• Flange: KF40 (NW40)
• Actuation: Air operated, spring fail-close
• Body Material: 316L Stainless Steel
• Seal: FKM / Perfluoro seal (semiconductor grade)
• Vacuum Range: High vacuum service
• Features: Low outgassing, corrosion resistant, optional position feedback
• Compatible Tools: AMAT wafer processing equipment (Etch, PVD, CVD)
• Cross PN: AMAT 3870-02890
• Weight: Approx. 2.05 kg
• Actuation Gas: Clean dry compressed air

Application

Used on vacuum lines of semiconductor wafer fabrication equipment. Installed on etch chambers, thin-film deposition chambers, turbo pump lines and vacuum transfer modules for vacuum isolation and chamber maintenance. It isolates process gas and vacuum volume to prevent backstreaming and preserve chamber vacuum level, widely deployed on AMAT platforms in 200mm / 300mm fabs.

Series Models

• KAV-150-P-10 (KF40, AMAT variant)
• KAV-150-P-01
• KAV-150-P-02
• KAV-150-P-03
• KAV-100-P
• KAV-200-P