MKS T3BIB-29916 Integrated Intelligent Vacuum Exhaust Throttle Butterfly Valve

I. Basic Information
Brand Model: MKS Instruments (USA) Type T3BIB-29916
Product Category: T3BI Series Integrated Intelligent Vacuum Exhaust Throttle Valve (integrating drive motor, control board, communication, valve body, without external controller)
Model Segmentation Explanation
T3BI: Series Name Intelligent Exhaust Throttle Valve
B: Butterfly Valve Structure
IB: Built-in Control Electronic Board + RS232 Digital Communication
29916: Complete Material Order Number of the Entire Machine

Core Hardware Structure
Integrated Whole Machine:
Upper part: Electrical Control Drive Unit (servo motor, main control board, signal terminals, heat dissipation holes)
Lower part: Vacuum Throttle Valve Body (stainless steel valve plate, fluororubber / Kalrez seal, vacuum flange interface)
Advantages: Eliminates independent pressure controller, saves cabinet space, simplifies vacuum pipeline wiring

 Key Electrical and Control Parameters
1. Power Supply
Valve Drive Power Supply: 24 VDC, Maximum Power < 100W
Optional Auxiliary Output: ±15 VDC (for vacuum capacitor gauge / Baratron gauge, maximum 650 mA)
2. Pressure Control Performance
Control Accuracy: 0.25% of the set value or 5 mV (take the larger value)
Adjustment Range: 0.0001% to 100% of the full range (support dual vacuum gauge input closed-loop)
Repeatability: < 0.1% FS
Full Close → Full Open Response: Standard 200 ms within; Small Diameter Rapid Version < 10 ms
Cv Flow Coefficient: Maximum 1.0, Large Extraction Speed Suitable for Process Chambers
Leakage Rate: Low Leak Version < 0.1%
3. Temperature Specifications
Electrical Control Module: 0 – 40℃
Valve Body Standard: 0 – 105℃; High Temperature Optional 150℃
Storage: -20 – 80℃
4. Communication and IO Interface
Digital Communication: RS232 (standard标配)， optional DeviceNet/RS485/Modbus
Analog Channels： ±10V/±5V/±1V Vacuum Gauge Signal Input (Dual Path)
Switching Quantity： 2 Path Relay Alarm Output (30 VDC/2A， with status indicator light)
25-pin D-Sub Comprehensive Terminal： Analog Pressure， Valve Position Feedback， TTL Input Output， Alarm Contact
5. Control Mode (Software Built-in)
Pressure Closed-loop Control (Mainstream， combined with vacuum gauge stable chamber pressure)
Valve Position Openness Direct Control
Slope Rise Speed Programmable， Anti-process Pressure Impact
Self-tuning PID Algorithm， Minimal Overshoot， High Process Repetitiveness
Fault Safety Mode Configurable： Fault Full Open / Full Close / Maintain Current Openness

Valve Body Sealing and Dimensions
Valve Body Material： 316 Stainless Steel
Sealing Standard： EPDM/FKM Fluororubber； Corrosion Process Optional Kalrez/Chemraz Perfluorine Seal
Interface： KF Vacuum Quick-Disconnect Flange (29916 Corresponds to Standard KF50 Diameter)
Overall Machine Weight： Approximately 1 kg

Typical Application Scenarios
Semiconductor Etching， Thin Film Deposition， PVD/CVD Vacuum Chamber Pressure Stabilization Control (The Most Commonly Used Industry Application)
Photovoltaic， Optical Coating Vacuum Process Exhaust Flow Regulation
Research High Vacuum Chamber， Ion Implantation Equipment
Industrial Coating， Precision Gas Vacuum Differential Pressure Control System