PFEIFFER EVR116 Electric Precision Vacuum Flow Regulating Valve

I. Basic Model Positioning
Brand: Pfeiffer Vacuum (a high-end vacuum equipment manufacturer from Germany)
Full name: EVR 116 Stepper Motor Driven Vacuum Precision Needle Valve / Gas Flow Regulating Valve
Interface Specification: DN16 ISO-KF standard vacuum flange
Core Application: High vacuum chambers, semiconductor coating, mass spectrometry, continuous closed-loop pressure / flow adjustment in laboratory vacuum systems, not a switch cutoff valve, can be continuously adjusted to control the intake volume without step changes

Core Performance Parameters
1. Pressure and Flow Range
Working absolute pressure range: 1×10⁻⁸ hPa ~ 2500 hPa (2.5 bar), covering ultra-high vacuum to normal pressure
Controllable flow range: 5×10⁻⁶ ~ 1250 mbar・l/s (with inlet filter)
Leakage rate: ≤1×10⁻¹⁰ Pa・m³/s (ultra-high vacuum sealing level)
Dead volume: Only 0.03 cm³, precise control of trace gases without lag
2. Drive and Action Time
Drive: Built-in stepper motor, needle stroke 11.5 mm
Full close → full open: 4 s; full open → full close: 3 s
Built-in position sensor: three-way feedback signals output for valve open / valve close / valve movement status
3. Electrical Specifications
Power supply: 24 VDC ±10%, maximum power consumption 12 VA
Static standby current: 20~30 mA; action peak 500 mA
Analog control signal: 0~10 VDC (0V full close, 10V full open, linearly corresponding to opening degree)
Protection level: IP40; working environment temperature 5~40℃

Valve Body Material and Corrosion Resistance Seal
Valve body shell: Stainless steel 1.4435 (316L)
Valve needle: Stainless steel 1.4301
Sealing sleeve: Fluoroplastics; main seal FKM (Viton rubber), suitable for most inert / corrosive gases
Baking temperature: Maximum 60℃ for the actuator, maximum 80℃ for the valve body (light baking for degassing)

Matching Control Equipment
RVC 300 (standard vacuum pressure controller)
Collect vacuum signal, output 0~10V to drive EVR116, automatic PID closed-loop stable pressure
IF 200 Communication Interface Module
Expand RS232 serial port, remote reading and writing of valve opening, pressure parameters by upper computer / industrial control software
Compatible with third-party PLC: direct 0~10V analog output can drive the regulating valve

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