Product Overview
2L81-050032-18 and TAB113-1/101-LF are original matched control board sets manufactured by TEL Tokyo Electron, specially designed for high-end semiconductor wafer etching, thin film deposition, ion implantation and precision process equipment. As the core mainboard components for signal control and process driving, they work in pairs to complete equipment signal acquisition, logical operation, process parameter closed-loop control and high-precision timing driving, ensuring stable operation of semiconductor precision process equipment.
Adopting original Japanese high-precision industrial manufacturing technology, the board set integrates dedicated signal processing chips, timing control units and isolated drive circuits, featuring strong anti-interference performance, ultra-high timing accuracy and long-term operational stability. It is fully compatible with full-series TEL semiconductor process equipment, widely used for equipment maintenance replacement, faulty board substitution, equipment renovation and production line upgrading, serving as an essential original spare part for wafer manufacturing equipment.
2. Technical Parameters
|
Parameter
|
Specification
|
|
Main Board Model
|
2L81-050032-18
|
|
Sub Board Model
|
TAB113-1/101-LF
|
|
Brand & Origin
|
TEL Tokyo Electron, Original Japan Imported
|
|
Product Type
|
Semiconductor Equipment Dedicated Control & Timing Drive Board
|
|
Applicable Equipment
|
TEL wafer etching machines, thin film deposition systems, semiconductor precision process equipment
|
|
Core Functions
|
Equipment timing control, process parameter closed-loop calculation, signal acquisition & isolated transmission, precision motion driving
|
|
PCB Technology
|
Industrial multi-layer precision PCB with fully isolated circuit design
|
|
Anti-interference Design
|
Optimized EMC electromagnetic compatibility, anti-high-frequency interference, anti-static, anti-surge
|
|
Operating Temperature
|
0℃ ~ +65℃ standard for semiconductor equipment
|
|
Operating Humidity
|
10%~90% non-condensing, cleanroom environment compatible
|
|
Version Feature
|
Version -18 is upgraded batch, fully interchangeable with old versions -14/-16
|
|
LF Feature
|
Lead-free environmental process, compliant with high-end semiconductor standards
|
|
Origin
|
Made in Japan, original imported
|
3. Product Features
-
Original Matched Compatibility: The 2L81-050032-18 mainboard and TAB113-1/101-LF sub-board are factory-matched sets with fully compatible software and hardware logic. It supports direct replacement of old-version boards without program modification or circuit reconstruction, realizing plug-and-play installation.
-
Ultra-precision Timing Control: Designed for nano-level semiconductor precision processes with minimal timing error, it accurately matches microsecond-level precision motion control for wafer etching and deposition processes, ensuring high yield rate and consistent process quality.
-
Industrial-grade Anti-interference Stability: Equipped with EMC electromagnetic shielding, circuit isolation and anti-static surge protection, it resists high-frequency RF interference and voltage fluctuation in semiconductor equipment, maintaining zero drift and zero failure during long-term operation.
-
Lead-free Eco-friendly Process: The LF suffix represents lead-free manufacturing, complying with environmental and access standards for high-end semiconductor cleanrooms, adapting to high-precision and high-cleanliness production conditions.
-
High Long-term Operational Reliability: Adopting Japanese original precision PCB and core chips with excellent temperature, humidity and aging resistance, it supports 7×24-hour uninterrupted continuous operation of semiconductor equipment and effectively reduces downtime failure rate.
-
Strong Versatility for Maintenance Replacement: As a universal core spare part for TEL equipment, it is widely used for wafer factory equipment maintenance, faulty board replacement, equipment renovation and production line upgrading, serving as a necessary component for semiconductor equipment operation and maintenance.
There are no reviews yet.