Product Description
ZYGO 7712 is a ZMI series dual‑frequency He‑Ne stabilized laser head, core light source for laser displacement interferometry system. 7712is standard version while 7701E is enhanced version. OEM discontinued, available mainly as used and refurbished spare parts in aftermarket. It outputs 632.8 nm dual‑frequency linearly polarized laser with 20 MHz beat frequency. It performs high‑precision displacement, position and velocity measurement. It can work with ZYGO interferometer signal processor boards to build multi‑axis measurement system. Widely deployed in semiconductor lithography tools, precision machine‑tool positioning, coordinate inspection and scientific metrology instruments. Features stable laser output, long coherence length and good resistance to back‑reflection, heavily used for OEM equipment integration.
Technical Specifications
| Item | Specifications |
|---|---|
| Model | 7712 |
| Laser Type | He‑Ne Helium‑Neon, CW, dual‑frequency, linearly polarized |
| Wavelength | 632.8 nm |
| Output Power | 1 mW typical |
| Beat Frequency | 20 MHz ±1600 Hz |
| Beam Diameter | 6 mm |
| Laser Safety Class | Class II |
| Supported axes | 7701C: up to 4 axes; 7701E: up to 8 axes |
| Power Supply | 24 VDC |
| Operating Temperature | 15℃‑30℃ (controlled environment) |
| Status | OEM discontinued; supplied as used / refurbished spare parts |
Applications
- Semiconductor equipment: multi‑axis displacement metrology for lithography & wafer inspection tools
- Precision machine‑tools, linear motor positioning, closed‑loop position feedback for motion stages
- CMM inspection, lab‑grade interferometric measurement for displacement, vibration and velocity
- OEM automation metrology equipment retrofit & legacy‑system spare‑part replacement
ZYGO ZMI Series Laser Head Models
- 7702: Higher‑power dual‑frequency laser head for extra measurement axes
- 7705: Compact ZMI laser head for space‑limited machine integration
- 7714: Water‑cooled high‑power model, good back‑reflection tolerance for industrial multi‑axis systems
- 7724: Water‑cooled maximum power, premium frequency stability for high‑end metrology systemsZYGO
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