Product Description
AMAT (Applied Materials) 0020-26374 is a precision mechanical spare part for semiconductor vacuum chambers, compatible with Endura and Centura PVD thin-film deposition platforms. It is a CNC-machined aluminum alloy structural component with ultra-sonic clean washing and vacuum-compatible surface treatment, featuring high dimensional accuracy and low outgassing property. It serves for positioning and supporting internal chamber assemblies, enduring vacuum and cyclic process temperature. It acts as key replacement spare part for wafer thin-film deposition processes, ensuring chamber assembly precision, cleanliness and stable wafer yield.
Specifications
- Part Number: 0020-26374
- Brand: AMAT (Applied Materials)
- Product Category: Semiconductor Chamber Mechanical Spare Part
- Base Material: Aluminum Alloy
- Machining: Precision CNC machining, deburring, ultrasonic cleanroom washing
- Surface Treatment: Vacuum-compatible passivation, low outgassing
- Working Environment: High vacuum, semiconductor cleanroom
- Compatible Tools: Endura / Centura PVD Physical Vapor Deposition Systems
- Function: Internal chamber support & positioning structural part
- Cleanliness Standard: Oil-free & particle-free, meets front-end semiconductor process requirements
Applications
Used on AMAT Endura and Centura PVD wafer processing equipment. Mounted inside process vacuum chamber to support and position target assemblies and wafer transfer mechanisms. Deployed in front-end thin-film deposition for chip manufacturing. It is used as replacement spare part during routine chamber maintenance or when original part suffers wear, deformation or corrosion. It preserves vacuum tightness and mechanical positioning accuracy to stabilize wafer production yield. Widely used in semiconductor fabs for PVD chamber overhaul and repair.
Series Models
0020-26372, 0020-26373, 0020-26375, 0020-26376, 0020-26377, 0020-26378
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