AMAT 0090-91763 Gas Tank Heater Assembly

AMAT 0090-91763 Gas Tank Heater Assembly

 Product Description

Part Number: 0090-91763
Applied Materials component, **Gas Box Heater Assembly, for the AMAT P5000 semiconductor etching equipment.
Used for heating the gas box cavity to maintain the working temperature of the pipelines and gas path components, preventing the condensation of process gases, and ensuring the stability of the semiconductor etching process.

 Key Points

1. Compatibility: Strictly based on part number 0090-09166; different versions of End Effector have similar shapes but cannot be interchanged, which may cause chip detachment and debris.
2. Material Status: Original factory still available for order, with a long lead time; available on the market: brand new original factory, OEM refurbished, dismantled second-hand parts.
3. Maintenance and Usage: Direct contact with the wafer, with a special coating on the surface, must not be bumped or scratched; disassembly and assembly must be performed in a clean environment.
4. Common Wear Points: Adhesion surface wear, coating peeling, positioning pin deformation. In case of these situations, components need to be replaced.

 Application Fields

Semiconductor wafer manufacturing; Applied Materials P5000 etching equipment; Equipment maintenance and spare parts replacement in chip manufacturing factories; Temperature control of dry etching process gas path.

 Related Part Numbers of the Same Series

– 0010‑56221: Different configuration versions of the same series heaters
– 0010‑50xxx: Gas chambers and heating components of the P5000 series
– 0090‑xxxx: Thermocouples and temperature control sensing spare parts for accessories