Basic Information
Material Number: 0190-22670 (Original Applied Materials part)
Equipment Ownership: AMAT semiconductor process equipment, compatible with mainstream platforms such as Endura and Centura (sputtering, etching, film deposition type machines)
Product Type: Analog / Signal Interface Board Card, belonging to the equipment’s process signal acquisition and control board
Working Environment: Semiconductor cleanroom, industrial-grade temperature resistance, anti-electromagnetic interference, supports 7×24h continuous operation
Core Parameters and Functions
Main Function
Responsible for collecting process parameters of the machine, converting analog signals, and conditioning sensor signals. It interacts with on-site sensing elements such as vacuum, temperature, pressure, and flow, transmits data to the upper-level master control board and executes control instructions.
Signal Specifications
Supports standard industrial analog signals: 4-20mA, 0-10V input/output
Integrates multiple digital I/O to achieve switch interlock, alarm, and status feedback
On-board signal filtering circuit to suppress environmental electromagnetic interference, ensuring signal accuracy
Hardware Characteristics
Standard cabinet card design, compatible with the equipment’s native slots, plug-and-play without complex wiring
On-board fuse protection, overvoltage / overcurrent protection to enhance equipment operation safety
Compatible with the original firmware of the machine, no additional flashing required, plug-and-play
Application & Spare Parts Information
Compatible Models: AMAT PVD, CVD, Etch series process equipment, are high-frequency and easily damaged spare parts for this type of equipment
Version Differentiation: There are suffix revisions (such as 0190-22670 Rev A/B/C), different versions of the same number of hardware are compatible and the firmware is universal
Market Status: The original factory has discontinued production, the market circulation is mainly in the form of refurbished and tested good products
Replacement Reference: There is no completely universal alternative model. Prefer to choose refurbished parts of the same material number; after replacement, the machine signal calibration is required
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