AMAT 0190-38324 is a 4-port UPA valve produced by Applied Materials.

AMAT 0190-38324 is a 4-port UPA (Unified Port Architecture) valve produced by Applied Materials. It is mainly used in semiconductor manufacturing equipment. Here is a detailed introduction about this product:
I. Product Features
Multi-port Design: The 4-port design enables flexible switching of gases among multiple paths, meeting complex process requirements.
High Precision Control: The valve has high-precision control capabilities for gas flow and pressure, ensuring stability and consistency in semiconductor manufacturing processes.
Corrosion-resistant Materials: Manufactured with corrosion-resistant materials, it can resist the erosion of various process gases and extend service life.
Easy Integration: Compact design, easy to integrate into existing semiconductor manufacturing equipment, reducing installation and commissioning time.

Application Scenarios
The AMAT 0190-38324 valve is widely used in semiconductor manufacturing equipment, such as chemical vapor deposition (CVD), physical vapor deposition (PVD), etching, etc. In these processes, the valve is used to precisely control the flow and pressure of process gases, ensuring uniformity and repeatability of deposition or etching processes.

Technical Specifications (Example)
As the specific technical parameters may vary depending on the product version and configuration, and the detailed technical specifications of AMAT 0190-38324 have not been directly found, but based on similar products, the following characteristics can be inferred for it:
Working pressure range: It may cover a wide range from low pressure to high pressure to meet different process requirements.
Flow control accuracy: It has high-precision flow control capabilities to ensure the precise delivery of process gases.
Interface type: It may adopt standard interface types, such as VCR or Swagelok interfaces, to facilitate connection with other devices.
Control mode: It may support manual control or automatic control, and achieve remote control through electrical signals.