AMAT 0191-72811-01 Semiconductor Power Module

Product Description

AMAT 0191-72811-01 is a power supply assembly for semiconductor equipment manufactured by Applied Materials. It belongs to the dedicated power module of the 0191 series, delivering stable and controlled DC power for semiconductor wafer process chambers. This unit integrates power conversion, signal monitoring and protection circuits. It features high anti-interference performance and compatibility with vacuum chamber environments. As a critical power spare part for etching and thin-film deposition tools, it can feed back voltage and current status in real time and support communication linkage with the main equipment controller. It activates rapid protection under overvoltage, overcurrent and short-circuit conditions to ensure stable wafer processing.

Specifications

• Part Number: 0191-72811-01
• Brand: Applied Materials (AMAT)
• Product Type: Semiconductor Equipment Power Supply Assembly
• Power Output: DC output with built-in voltage & current sampling feedback
• Protection: Overvoltage, Overload, Short Circuit, Over Temperature Protection
• Operating Environment: Designed for semiconductor process tools, resistant to tool vibration and cleanroom conditions
• Communication: Supports signal interaction with equipment main control board
• Compatible Tools: AMAT semiconductor wafer processing platforms

Application

1. Supplies power to process chambers of AMAT etching, PVD / CVD thin-film deposition wafer tools;
2. Provides controllable DC power for chamber electrodes, heating or bias units;
3. Collects power parameters in real time and transmits data to the equipment control system for closed-loop process monitoring;
4. Serves as OEM spare part for routine maintenance and fault replacement to reduce tool downtime;
5. Used in semiconductor process equipment for 8-inch and 12-inch wafer fabrication lines.

Same Series Part Numbers

0191-72811-00

0191-72811-02,

0191-72811-03

0191-72810-01

0191-72812-01

0191-72813-01