1. Product Description
Part Number: 0100‑71443 Manufacturer: Applied Materials (AMAT)‑AKT Division Full Name: CHAMBER DISTRIBUTION 55K CVD Board This board is a critical component for AKT cluster CVD systems. Form factor is 6U VMEbus card, mounted inside the VME card cage. It performs high‑voltage power distribution inside CVD process chamber, provides power path and safety protection for plasma thin‑film deposition process. It is an essential spare part for stable coating production. OEM status: Obsolete. Available as new surplus, refurbished and used units from third‑party suppliers.
2. Technical Specifications
| Item | Specification |
|---|---|
| Form Factor | 6U VMEbus Card |
| Logic Power Supply | 24 VDC |
| Process Voltage Handling | 55 kV high‑voltage circuit |
| Output Channels | Multi‑channel power outputs |
| Cooling | Active forced cooling |
| Safety Features | Over‑current protection, over‑voltage protection |
| Operating Environment | Class10‑100 clean‑room, EMI hardened for plasma chamber environment |
| Interfaces | VME backplane connector, multi‑pin D‑Sub, high‑voltage RF connectors |
| Weight | Approx. 1.2 kg |
| Country of Origin | USA |
| Lifecycle | OEM obsolete; typical third‑party warranty: 12 months |
| Compatible Tools | AKT Pivot, ARISTO cluster CVD thin‑film deposition tools |
3. Product Performance
- Centralized high‑voltage power distribution for CVD chamber; multi‑channel independent output ensures balanced plasma power delivery.
- Hardware‑based over‑current & over‑voltage protection. It cuts off power loop rapidly under process fault to protect chamber and hardware modules.
- VMEbus communication with main CPU board; on‑board diagnostic LEDs for quick on‑site troubleshooting.
- Industrial‑reinforced PCB & components, resistant to heavy EMI generated by plasma process, supporting 24‑hour continuous mass‑production operation.
- Modular plug‑in design for fast replacement during maintenance, minimizing tool downtime.
4. Application Fields
- Display Panel Manufacturing: PECVD thin‑film deposition for large glass substrates; TFT‑LCD & OLED substrate coating.
- Semiconductor Industry: Power distribution for cluster CVD process chambers, thin‑film deposition manufacturing.
- Photovoltaic Thin‑Film Equipment: Control component for silicon‑based thin‑film solar cell deposition tools.
- Only compatible with AKT Pivot / ARISTO cluster vacuum process systems; not interchangeable with other brand tools.
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