LAM 605-109114-003 VME Bus CPU Main Control Board Card

Product Description

LAM RESEARCH 605-109114-003 (V7668A VXWIN) is a VME-bus CPU main control board dedicated for semiconductor etch equipment. It is the core controller for LAM 2300 and Exelan series etchers. The board integrates embedded processor, memory, solid-state storage and multi-port network interfaces, running VXWIN real-time OS. It centrally controls process timing, RF power, gas path and vacuum chamber, and manages process recipes. This is an OEM spare part for semiconductor tools, discontinued by original manufacturer, mainly used for maintenance replacement of wafer fab etch equipment.

Specifications

• Model: 605-109114-003, Alternative P/N V7668A-132L00W03
• Bus Standard: VME64
• OS: VXWORKS (VXWIN)
• Interfaces: Multi Gigabit Ethernet, Serial Port, VME backplane interface
• On-board Storage: Onboard Flash memory for recipes and firmware
• Power Supply: +5V / ±12V from VME backplane
• Mounting: VME chassis slot installation
• Compatible Tools: LAM 2300 series, Exelan plasma etchers
• Operating Temperature: 0℃ ~ +55℃
• Functions: Recipe loading, equipment logic control, data acquisition, fault diagnosis, host communication

Application

Designed for Lam Research plasma etchers in semiconductor industry, serving as the main controller for wafer etch process module. It controls RF generators, MFCs, vacuum valves and pressure sensors to execute etch steps. It receives recipes from host computer and uploads equipment status & process data. Widely used for spare replacement and retrofit of 8-inch /12-inch wafer fab etch systems.

Same Series Models

605-109114-001, 605-109114-002, 605-064676-006, 605-064676-007, 605-064676R008