LAM 605-707109-012 PCB Control Board

Product Description

Model: 605-707109-012 Brand: LAM Research Name: VME-LTNI-S5 PCB Control Board / Network Interface Board This is an original VME bus communication control board for LAM semiconductor etch equipment, 6U VME form factor. It acts as the core communication hub of the tool, equipped with LTNI-S5 communication unit. It handles real-time data exchange, command distribution and status feedback among main controller, process chamber, RF and gas modules. Designed for cleanroom environment with strong anti-interference and low latency. It is a widely used OEM replacement spare part for semiconductor Fab maintenance.

Specifications

• Model: 605-707109-012
• Brand: LAM Research
• Product Name: VME-LTNI-S5 PCB Control Board (Network Interface Board)
• Form Factor: 6U VME
• Communication IC: LTNI-S5
• Interfaces: VME bus connector, Ethernet port
• Operating Temp: 0~50℃, semiconductor cleanroom
• Protection Class: IP20
• Origin: USA
• Application: Semiconductor plasma etch system
• Note: Obsolete spare part, for emergency repair and spare inventory

Application

Compatible with LAM plasma etchers. It serves as VME bus communication gateway to connect internal subsystems and link the tool to fab host system. Applied for breakdown maintenance, spare replacement and inventory stock for wafer etch tools in semiconductor fabrication plant. It is a critical spare part for communication-related downtime.

Series Part Numbers

605-707109-001 605-707109-002 605-707109-011 605-707109-012