LAM RESEARCH 810-049000-108 I/O Interface Control Board

Product Description

LAM RESEARCH 810-049000-108 is an I/O interface control board for Lam Research plasma etch tools, a dedicated spare part for LAM 2300 and Exelan series etchers. It is designed for signal acquisition and output control of chamber sensors, solenoid valves and pneumatic actuators. The board integrates digital input, digital output and analog acquisition channels. It monitors and controls chamber interlock, pressure, temperature and gas valve status, with built-in hardware fault diagnosis and VME backplane communication. It is OEM spare part for maintenance replacement of legacy etch tools in wafer fabs.

Specifications

• Model: 810-049000-108
• Bus Interface: VME bus
• Channel Type: DI digital input, DO digital output, AI analog acquisition
• Power Supply: +5V / ±12V from VME backplane
• Mounting: VME chassis slot installation
• Compatible Tools: LAM 2300, Exelan plasma etch platforms
• Operating Temperature: 0℃ ~ +55℃
• Functions: Chamber interlock detection, pneumatic valve driving, process status acquisition, fault reporting, hardware watchdog protection
• Environment: Suitable for control cabinet inside semiconductor Fab

Application

Used on LAM plasma etch systems for 8-inch and 12-inch wafer fabs. As auxiliary chamber I/O controller, it collects signals from pressure, temperature and limit sensors, drives gas solenoid valves and pneumatic cylinders, and manages chamber door interlock loops. It ensures safe chamber interlock and correct process sequence execution. It is critical spare part for etcher maintenance, replacement and retrofit projects.

Same Series Models

810-049000-101, 810-049000-102, 810-049000-105, 810-049000-106, 810-049000-109