LAM 810-099175-012 PCB Control Board

Product Description

Model: 810-099175-012 Brand: LAM Research Name: PCB Control Board (OT Module Board) This is an original PCB control assembly for LAM semiconductor etch equipment, a core process control board. It is responsible for process signal acquisition, timing logic operation and IO signal scheduling inside the tool, equipped with multi-channel signal ports for stable real-time signal interaction. Built for cleanroom industrial environment with good anti-interference performance. It is a common OEM replacement spare part for maintenance in semiconductor Fab.

Specifications

• Model: 810-099175-012
• Brand: LAM Research
• Product Name: PCB Control Board / OT Module Board
• Type: PCBA Circuit Board Assembly
• Interfaces: Multi-pin signal connectors, IO pin headers
• Operating Temp: 0~50℃, semiconductor cleanroom
• Protection Class: IP20
• Origin: USA
• Compatible Tool: LAM plasma etcher
• Note: OEM spare part, for emergency breakdown repair and spare inventory

Application

Compatible with LAM plasma etch semiconductor systems. It acts as a sub-board for process control to realize process signal sampling, logic control and IO feedback. It is applied for breakdown maintenance, spare replacement and inventory stock for wafer etch tools in semiconductor fabrication plant, critical spare part for signal control related downtime.

Series Part Numbers

810-028298-005 810-028298-009 810-028298-015 810-028298-025