Product Description
LAM Research 810-001489-016 (substrate model V7668A-132L00W04), **6U VME bus single-board computer**, the main control board of the original equipment of LAM etching machine, integrating 4-port Gigabit Ethernet, responsible for equipment process control, real-time data interaction, and machine communication scheduling, belongs to the core industrial control spare parts of semiconductor etching equipment.Key Technical Parameters Table
| Project | Parameter | | — | — |
| Board Type Specification | 6U VMEbus Single Board |
| Native Network Ports | 4×RJ45 Gigabit Ethernet, 10/100/1000Mbps Auto-Sensing |
| Matching Board Model | V7668A-132L00W04 |
| On-board Expansion | PMC Expansion Sub-card Interface |
| Operating Temperature | -20℃ ~ +60℃ |
| Storage Temperature | -40℃ ~ +85℃ |
| Operating Humidity | 10%~90% RH (No Condensation) |
| Power Supply | 5VDC |
| Assigned Equipment | Compatible with LAM Kiyo E Series Etching Machines |
Product Performance
Real-time process control of the equipment, data collection of machine status, multi-channel high-speed industrial network communication, fault monitoring and alarm, meeting the requirements for long-term uninterrupted and stable operation of semiconductor clean rooms.
Application Fields
Semiconductor wafer manufacturing; Dielectric / Conductive etching process; Main control unit of LAM Kiyo E series etching machines; Clean process equipment control in wafer factories.
Similar Series Models (605-109114 Family)
– 605-109114-001 (V7668A-131000)
– 605-109114-002
– 605-109114-003 (V7668A-132L00W03)
– 605-109114-004 (V7668A-132L00W04)
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