I. Basic Information
Brand: LAM Research (Fulbright Semiconductor, the leading semiconductor etching equipment company in the US)
Full part number: 810-102361-222, also known as 810-102361R222 (R represents the version identifier, and the hardware is completely identical and interchangeable)
Official name: Chamber MUX PCB Vacuum Chamber Multi-Channel Switching Control Motherboard
Applicable equipment: LAM series dry etching machines (silicon etching, dielectric etching equipment, 8-inch / 12-inch wafer processing)
Core Positioning and Functions
Vacuum Chamber Signal Multi-Channel Multiplexing Central Hub
As the signal bridge between the equipment main control and the process vacuum chambers, it centrally switches multiple vacuum pressures, gas flow rates, valves, temperatures, plasma states, etc.; realizes time-sharing / parallel process signal scheduling to ensure etching uniformity control.
Process Recipe Timing Synchronization Control
Equipped with LAM’s dedicated ToolLink high-speed bus protocol, microsecond-level synchronization of plasma power supply, gas switching, vacuum valve actions, compatible with the strict timing requirements of 2/3nm advanced processes, stores local etching recipes and executes them in real time.
Safety Interlock and Fault Diagnosis
Real-time monitoring of chamber door locks, vacuum leaks, gas abnormalities, temperature over-limitations; once the process conditions are not met, the hardware quickly cuts off the RF source, closes the process gas, and simultaneously reports equipment upper-level alarms; comes with hardware dual watchdogs to prevent program runaway causing wafer
Data Upload and Traceability
Upload the real-time process parameters of the chamber to the equipment MES system， complete the full-process data recording and traceability of each wafer.
Hardware Interfaces and Structure
Bus Interface
Right-side European-style large backplane connector： connects to the equipment main control rack system bus
Front panel multiple sets of aviation / coaxial terminals： RF monitoring， vacuum gauge， multi-channel gas flow meter， temperature sensor input/output
On-board Hardware
Multi-channel signal isolation chips， high-speed AD/DA conversion， process storage Flash， status LED indicators (operation / communication failure / channel abnormality)， ESD protection circuit (4kV static protection)
Installation Form
Standard rack vertical plug-in industrial control board card， installed vertically in the cabinet， supports individual insertion and replacement without requiring the entire machine to be shut down.
Electrical Environment Specifications
Power Supply： DC24V standard power supply for the equipment cabinet
Isolation Voltage： 3750VDC electrical isolation between channels， resisting RF plasma interference
Operating Temperature： -25℃ ~ +75℃， suitable for semiconductor cleanroom constant temperature cabinet environment
Certification： RoHS， SEMI semiconductor equipment safety standards
Typical Application Scenarios
12-inch wafer chip manufacturing production line Dry etching equipment Core Control Board：
Logic / storage medium etching chamber signal acquisition and switching
Multi-chamber parallel production time-sharing multi-channel signal scheduling
Full-process vacuum， gas， RF， temperature process parameters closed-loop control
Not part of power plant DCS， SIS safety system， and has no compatibility with the equipment spare parts you previously queried ABB， HIMA， Woodward， etc. It is only a semiconductor-specific equipment spare part.
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