LAM 810-802902-033 Multi-axis servo motion control board for semiconductor etching equipment

Product Description

Model: LAM 810-802902-033, Multi-axis Servo Motion Control Board for LAM Research Semiconductor Etch System. It is designed for LAM wafer etcher platform. This PCB integrates servo drive and motion control circuitry, responsible for nano-precision positioning of wafer chuck stage. It receives motion commands from host controller, outputs servo drive signals and collects encoder position feedback to achieve high-precision synchronized axis control. Original spare part for semiconductor wafer processing equipment, VME bus plug-in card for direct replacement, a core component of etch chamber motion subsystem.

Specifications

1. Type: Multi-axis Servo Motion Control PCB Board
2. Brand: LAM Research
3. Bus Interface: VME bus, connected to equipment backplane
4. Controlled Axes: 6 axes base servo control, expandable to 12 axes
5. Positioning Accuracy: Nano-level, ≤0.3μm with laser encoder
6. Feedback: Laser encoder, Sin/Cos 1Vpp encoder, resolver
7. Communication: EtherCAT for high-speed real-time motion command transmission
8. Power Supply: 24VDC logic power; 400VAC servo power
9. Max Power Output: ≤8kW
10. Max Speed: 4000 rpm; Max Torque 30 Nm
11. Command Response Time: ≤0.5ms
12. Operating Environment: 10℃ ~ 35℃, cleanroom condition, humidity 30~70% non-condensing
13. Compliance: SEMI S2 semiconductor equipment safety standard
14. Construction: Standard VME plug-in card, rack backplane mounting

Application

• Precise motion control of wafer chuck stage for LAM Research dry etch semiconductor equipment
• X/Y/θ multi-axis synchronized positioning, high-speed handling and leveling of silicon wafer
• Original spare part replacement for motion subsystem of semiconductor etch chamber
• Equipment retrofit & maintenance repair replacement
• Nano-precision positioning stage and servo axis control inside vacuum chamber

Family Models

• 810-802902-004: Base multi-axis servo control board
• 810-802902-011: Intermediate revision
• 810-802902-022: Advanced revision
• 810-802902-033: Latest revision (this item)
• 810-072907-005: LAM single-axis motion control board
• 810-234640-213: LAM motion I/O interface board
• 810-028296-160: VME digital I/O board

Dimensions & Weight

• Dimensions (VME card): H233mm × W160mm × D25mm
• Net Weight: approx. 0.65 kg
• Gross Weight (ESD box + foam): approx. 1.1 kg