SMC INR-498-011D Semiconductor Single-Loop Precision Temperature-Controlled Cold Water Machine

I. Basic Positioning and Application
It belongs to the SMC INR-498 large-scale industrial temperature control cooling unit series, a dedicated high-precision constant temperature equipment for semiconductor wafer processing
Suitable for 8/12 inch wafer production lines:
Etching (ETCH), CVD, Ion Implantation (IMPLA), CMP, measurement equipment, RTP diffusion furnace, electrostatic chuck ESC temperature control
Precise coating, semiconductor testing, high-end laser equipment cold and hot temperature control

Core Hardware Specifications (Same as Series 011C/011D General Benchmark Parameters)
Loop and Output: Single loop, 4 fluid output interfaces
Flow: 13 gpm (gallons/minute) pump flow
Heating Power: 15 kW high-power heating module, rapid temperature rise compensation
Overall Net Weight: 220 kg
Matching Controller: INR-498-P542 (Model Marked as CONTROLLER PBC, It is the main control unit of this machine)
Circulation Medium: High-purity deionized water DIW, ethylene glycol antifreeze fluid system (Semiconductor process standard)

 Operating Characteristics
Bidirectional precise closed-loop temperature control, suitable for the wide temperature range requirements of semiconductor processes
Industrial-grade protection, 24-hour continuous uninterrupted production line design
It comes with multiple safety interlock alarms for pressure, flow, level, and over-temperature, suitable for the strict safety regulations of cleanroom workshops